Vacuum Quality in Vacuum Process Engineering – does it matter?
Wednesday 12th October 2016 | Lounge One, Ricoh Arena, Coventry, CV6 6GE
Introduction
The vacuum environment is required for varied processes; these may include the study of specific particles or removal of unwanted species before admitting those that are required for study or use.
The residual gases still present in the vacuum achieved may not always be regarded as important, but they can have a detrimental effect on the proceeding process.
Before processing, by simply pumping to base pressure thereby achieving ultimate quantity, may not be sufficient, as what is in the residual gas, the quality, is really what is important.
This meeting addresses these issues for very large-scale environments to the smaller scale process chambers for plasma processing.
Invited Oral Programme
Session chair: Dr Hayley Brown
12.10 Extending the limits of detection into the PPT range with a QMS
Jonathan Leslie, Mass Spectrometry Solutions, MKS Instruments
13.00 Close — Posters + Exhibition
