Cryopumping explained ….. “It’s a trap”

Wednesday 12th October 2016 | Lounge South, Ricoh Arena, Coventry, CV6 6GE

Introduction

Application experts in cryopumping, two international and two from the UK, will present an overview of how a cryopump works and some diverse applications.  This half-day meeting will be of interest to newcomers to cryopump technology, as well as experienced users.

Delegates will learn how a cryopump works including an explanation of the Gifford McMahon cooling cycle and understand key features of cryopumping like UHV compatibility, high water pumping speeds and dry pumping. An overview of applications will be presented including Semiconductor, Industrial Coating, UHV, MBE, Space Simulation (large volumes) and R&D Laboratories.

There are three application specific presentations that demonstrate how cryopumps are employed to benefit Forensic Science, the ITER Tokomak for fusion power, and the semiconductor industry.

Invited Oral Programme

Session chair: Richard Frost, Sumitomo