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Contamination Control, Cleaning and Surface Preparation for Vacuum Applications

Thursday 16th October 2014 | Ricoh Arena, Coventy

Meeting History [edit]

10:00 An Introduction to ‘Contamination Control, Cleaning and Surface Preparation for Vacuum Applications’
Joe Herbert, ASTeC Vacuum Group, STFC Daresbury Laboratory
10:15 Concerned about the upcoming sunset date for Trichloroethylene
Mark Duggan, Acota
10:35 Surface Cleaning with Gas Cluster Ion Sources
Tim Nunney, Thermo Fisher Scientific
10:55 Developing cleaning for XHV at Daresbury
Keith Middleman, ASTeC Vacuum Group, STFC Daresbury Laboratory
11:15 – coffee break –  (15 minutes)
11:30 RGA’s for Vacuum Diagnostics and Outgassing Measurements
Guenter J Peter, Inficon Ltd., Balzers, Liechtenstein
11:50 Case Study
Stephen Fletcher, X-Tek Systems Ltd., Nikon
12:10 Vacuum Cleanliness in the Semiconductor Industry
Alan Webb, Consultant
12:30 Vacuum Support, whatever that might be?
Tom Weston, STFC Daresbury Laboratory
12:45 – meeting close –
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