Contamination Control, Cleaning and Surface Preparation for Vacuum Applications
Thursday 16th October 2014 | Ricoh Arena, Coventy
Meeting History [edit]
| 10:00 | An Introduction to ‘Contamination Control, Cleaning and Surface Preparation for Vacuum Applications’ Joe Herbert, ASTeC Vacuum Group, STFC Daresbury Laboratory |
| 10:15 | Concerned about the upcoming sunset date for Trichloroethylene Mark Duggan, Acota |
| 10:35 | Surface Cleaning with Gas Cluster Ion Sources Tim Nunney, Thermo Fisher Scientific |
| 10:55 | Developing cleaning for XHV at Daresbury Keith Middleman, ASTeC Vacuum Group, STFC Daresbury Laboratory |
| 11:15 | – coffee break – (15 minutes) |
| 11:30 | RGA’s for Vacuum Diagnostics and Outgassing Measurements Guenter J Peter, Inficon Ltd., Balzers, Liechtenstein |
| 11:50 | Case Study Stephen Fletcher, X-Tek Systems Ltd., Nikon |
| 12:10 | Vacuum Cleanliness in the Semiconductor Industry Alan Webb, Consultant |
| 12:30 | Vacuum Support, whatever that might be? Tom Weston, STFC Daresbury Laboratory |
| 12:45 | – meeting close – |
