Subscribe for updates

Vacuum Quality in Vacuum Process Engineering – does it matter?

Wednesday 12th October 2016 | Lounge One, Ricoh Arena, Coventry, CV6 6GE

Introduction

The vacuum environment is required for varied processes; these may include the study of specific particles or removal of unwanted species before admitting those that are required for study or use.

The residual gases still present in the vacuum achieved may not always be regarded as important, but they can have a detrimental effect on the proceeding process.

Before processing, by simply pumping to base pressure thereby achieving ultimate quantity, may not be sufficient, as what is in the residual gas, the quality, is really what is important.

This meeting addresses these issues for very large-scale environments to the smaller scale process chambers for plasma processing.

Invited Oral Programme

Session chair: Dr Hayley Brown

10.00  Introduction – Dr Alan Webb
11.30  Ion beam processing — the role of vacuum quality
Dr David Pearson, Oxford Instruments

12.10 Extending the limits of detection into the PPT range with a QMS
Jonathan Leslie, Mass Spectrometry Solutions, MKS Instruments

13.00  Close — Posters + Exhibition

 

Technical Programme Committee:
Dr Alan Webb, Consultant
Dr Gordon Jones, Waters Incorporated
Dr Hayley Brown, Plasma Quest Ltd
Dr James O’Shea, University of Nottingham
A jointly organised meeting sponsored and/or endorsed by three IOP Groups:
Register now!

Next Event

10 & 11 October 2018, Ricoh Arena, Coventry
301 Days to go

Platinum Sponsor

Platinum Sponsor

Gold Sponsor

Gold Sponsor

Corporate Sponsor

Corporate Sponsor

Directory sponsor

Directory sponsor

For more details of sponsors

For more details of sponsors