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RGA11 | RGA calibration in industry and research

Wednesday 16th October 2013 | Lounge One North, Ricoh Arena, Coventry

Programme

Steady demand for vacuum systems, as emerging technologies place demand on suppliers (LED, PV, Sensors), continues to drive the development of instrumentation for testing the vacuum environment.

RGAs, based on a quadrupole mass spectrometer, are the classic measuring instrument for evaluating for leaks and residual gas composition in a vacuum system. They are used in high vacuum applications such as research chambers, surface science research systems, accelerators, scanning microscopes, microelectronics fab, etc.

The same quadrupole mass spectrometers are extensively used as instruments to provide quantitative analysis in systems and to control processes like physical and chemical vapour deposition, etch, etc.

RGAs are however difficult to calibrate and there is currently no traceability to any national primary standard. In addition to the presentation of recent innovations in RGA technology and calibration, this meeting will drive the industry towards the establishment of a reasonable traceable calibration scheme for mass spectrometers.

Call for Abstracts

This high level meeting will comprise a programme of invited speakers from around the World. Additionally we invite contributions for poster presentation. Subjects matter is not limited to calibration and can include other RGA technology innovations, leak detection best practice, technology and techniques.

Please log in to the website, register to attend and advise us of your intention to offer an abstract as early as possible. Deadline for oral presentations has passed, but Poster presentations remain open for submission.

RGA-User-Group_200x109
A RGA User Group meeting
The RGA User Group provides a forum for exchange of
information and experiences. We organise meetings with
the aim of bringing together industrial, academic and
research based RGA users with suppliers of RGAs.

Event Type: Conference
Event Title: RGA 11 – RGA Calibration in Industry & Research
Organised By: RGA User Group
Fee: none
Requires Registration: Yes
Contact details: Robin Hathaway
E-mail: robin@ss-sci.com
Tel: 01323 638230

Register now!

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