Vacuum Quality in Vacuum Process Engineering – does it matter?
The vacuum environment is required for varied processes; these may include the study of specific particles or removal of unwanted species before admitting those that are required for study or use.
The residual gases still present in the vacuum achieved may not always be regarded as important, but they can have a detrimental effect on the proceeding process.
Before processing, by simply pumping to base pressure thereby achieving ultimate quantity, may not be sufficient, as what is in the residual gas, the quality, is really what is important.
This meeting addresses these issues for very large-scale environments to the smaller scale process chambers for plasma processing – MORE…